Hercules - Reluctance Tuning Actuator
The Hercules represents the pinnacle of reluctance actuator technology. Built on Fluxthor’s patents, it combines ferromagnetic material, permanent magnets, coils, and a compliant mechanism to deliver the highest precision achievable from any electromagnetic actuator in its class.
Reluctance tuning enables extremely fine magnetic-field tuning, zero-heat static force generation, and exceptional thermal management, all of which are critical for ultra-high-precision applications where thermal drift is the dominant error source. The Reluctance Tuning Actuator requires Fluxthor’s specialized controllers to unlock its full performance capabilities.
Key Advantages
Sub-nanometer
Precision
Feedforward resolution in single digit nanometers and feedback resolution of subnanometer, 10x more precise than our other products.
Zero-Heat
Static Force
Reluctance tuning enables holding high forces without continuous power dissipation, eliminating thermal drift at static positions.
Patented Technology
Protected by multiple patents, ensuring Fluxthor’s inventors develop it to its full potential to serve our customers the best way possible.
| Specification | Hercules-RTA30 | Hercules-RTA40 | Hercules-RTA60 | Hercules-RTA100 |
|---|---|---|---|---|
| Dimensions [mm × mm × mm] | 30 × 30 × 40 | 40 × 40 × 50 | 60 × 60 × 60 | 100 × 100 × 70 |
| Continuous Force [N] | ±7 | ±21 | ±24 | ±57 |
| Motor Constant [N/A] | 245 | 468 | 224 | 131 |
| Stroke [µm] | ±100 | ±200 | ±500 | ±1000 |
| Moving Mass [g] | 36 | 51 | 99 | 210 |
Applications
The Hercules is engineered for the most demanding precision environments where sub-nanometer accuracy and thermal stability are non-negotiable. Allowing for quasi-static force generation with zero heat dissipation::
Magnetic levitation stages for semiconductor lithography
Wafer positioning and alignment stages
Precision gravity compensation systems
Ultra-high-vacuum nano-positioning
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